LED器件及模组领域 Surface morphology、Dimension Measurement 表面形貌、尺寸量测 Optical profiler, SEM, TEM Film type and thickness 薄膜类型及薄膜厚度 SEM/EDS, TEM/EDS Q-well structure **井结构分析 SEM/EDS, TEM/EDS Defects (Dislocations) 缺陷分析 TEM Q-Well Periodic Doping Profile **井周期掺杂分布 SIMS Defect Isolation 缺陷定位 EMMI、OBIRCH Failure Analysis 失效分析 X-ray,SAM,EMMI,SEM,FIB,TEM ESD Testing 静电测试 可靠性测试